Design of Ultrasonic Transducer MEMS Model for Distance Measurement using Multiphysics
نویسندگان
چکیده
The technique in artificial ultrasonic transducer using electronics is very bulky and power hungry. We switched over to ultrasonic Micro-Electronics Mechanical Systems (MEMS) which have shown significant importance for miniaturized mechanical system, based on silicon technology. MEMS based acoustic sensing transducers commonly employ the piezo-electric technology to interpret the received ultrasonic reflection. Prior to fabrication of MEMS device design simulations are extensively needed to avoid expensive time and cost. The aim of the present work is to describe the design of different lead free piezoelectric materials based ultrasonic transducer and their performance. COMSOL Multiphysics 4.2a is versatile tool and is used to design and solve the transducer device with 3D partial differential equations. In this paper, 2D axissymmetry model geometry of piezoelectric transducer was designed with lead free piezoelectric material like Barium Sodium Niobate (Ba2NaNb5O15) which is capable of being used as thin film. The potential of 20 Volts with 140 KHz frequency was applied to the device that was inside geometry of cylindrical air medium. The surface and radial displacement of the transducer structure of the material with pressure and stress were studied
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